Parylene-pyrolyzed carbon for MEMS applications
This paper presents Parylene-pyrolyzed carbon for MEMS applications. Carbons have been used as conductive materials with many promising chemical and thermal properties. This paper focuses on parylene-pyrolyzed carbon to take advantages of its smooth surface deposition and benzene-rich chemical structure. The description of the parylene-pyrolyzed carbon has been tried through evaluations of electrical and mechanical properties in terms of MEMS applications as well as general features. Young's modulus and the resistivity of parylene-pyrolyzed carbon (800°C pyrolysis) becomes 70GPa and 0.1 Ωcm, respectively. The relationship between these properties and density will be also discussed.
Additional Information© 2004 IEEE. Date of Current Version: 27 September 2004. The authors would like to thank the support from NSF CNSE ERC at Caltech and Mr. and Mrs. Boland for their help with TGA, and Mrs. Carol M. Garland for her technical support with TEM observation.
Published - LIGmems04.pdf