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Published November 5, 2015 | Published
Journal Article Open

High resolution on-chip optical filter array based on double subwavelength grating reflectors


An optical filter array consisting of vertical narrow-band Fabry-Pérot (FP) resonators formed by two highly reflective high contrast subwavelength grating mirrors is reported. The filters are designed to cover a wide range of operation wavelengths (Δλ/λ = 5%) just by changing the in-plane grating parameters while the device thickness is maintained constant. Operation in the telecom band with transmission efficiencies greater than 40% and quality factors greater than 1,000 are measured experimentally for filters fabricated on the same substrate.

Additional Information

© 2015 OSA. Received 17 Sep 2015; revised 30 Oct 2015; accepted 2 Nov 2015; published 5 Nov 2015 16 Nov 2015. This work was supported by Samsung Electronics and DARPA. Y.H. was also supported as part of the U.S. Department of Energy "Light-Material Interactions in Energy Conversion" Energy Frontier Research Center under grant DE-SC0001293 and a Japan Student Services Organization (JASSO) fellowship. The device nanofabrication was performed in the Kavli Nanoscience Institute at Caltech.

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Published - oe-23-23-29848.pdf


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August 20, 2023
August 20, 2023