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Redondo, A. and Goddard, W. A., III and Swarts, C. A. et al. (1981) Oxidation of silicon surfaces. Journal of Vacuum Science and Technology, 19 (3). pp. 498-501. ISSN 0022-5355. doi:10.1116/1.571046. https://resolver.caltech.edu/CaltechAUTHORS:REDjvst81a

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