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Cheung, N. W. and von Seefeld, H. and Nicolet, M-A. et al. (1981) Thermal stability of titanium nitride for shallow junction solar cell contacts. Journal of Applied Physics, 52 (6). pp. 4297-4299. ISSN 0021-8979. https://resolver.caltech.edu/CaltechAUTHORS:CHEjap81

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