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Suni, I. and Shreter, U. and Nicolet, M-A. et al. (1984) Influence of F and Cl on the recrystallization of ion-implanted amorphous Si. Journal of Applied Physics, 56 (2). pp. 273-278. ISSN 0021-8979. https://resolver.caltech.edu/CaltechAUTHORS:SUNjap84

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