A Caltech Library Service

Browse by Eprint ID

Number of items: 1.

So, F. C. T. and Kolawa, E. and Zhao, X.-A. et al. (1987) Summary Abstract: Reactively sputtered RuO2 and Mo–O diffusion barriers. Journal of Vacuum Science and Technology B, 5 (6). pp. 1748-1749. ISSN 1071-1023. https://resolver.caltech.edu/CaltechAUTHORS:SOFjvstb87

This list was generated on Sun Mar 7 04:03:09 2021 PST.

CaltechAUTHORS is powered by EPrints 3.3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.