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So, F. C. T. and Kolawa, E. and Zhao, X.-A. et al. (1987) Summary Abstract: Reactively sputtered RuO2 and Mo–O diffusion barriers. Journal of Vacuum Science and Technology B, 5 (6). pp. 1748-1749. ISSN 1071-1023. doi:10.1116/1.583631.

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