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Number of items: 1. Wong, Joyce and Scherer, Axel and George, Thomas (1997) Surface micromachined membranes for tunnel transducers. Journal of Vacuum Science and Technology B, 15 (6). pp. 2768-2772. ISSN 1071-1023. https://resolver.caltech.edu/CaltechAUTHORS:WONjvstb97 |