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Wong, Joyce and Scherer, Axel and George, Thomas (1997) Surface micromachined membranes for tunnel transducers. Journal of Vacuum Science and Technology B, 15 (6). pp. 2768-2772. ISSN 1071-1023. doi:10.1116/1.589724. https://resolver.caltech.edu/CaltechAUTHORS:WONjvstb97

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