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Yang, X. and Yang, J. M. and Wang, X. Q. et al. (1998) Micromachined membrane particle filters. In: International Workshop on Micro Electro Mechanical Systems,11th (MEMS 98), Heidelberg, Germany, 25-29 January 1998. IEEE , Piscataway, NJ, pp. 137-142. ISBN 0-7803-4412-X. http://resolver.caltech.edu/CaltechAUTHORS:YANmems98

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