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Temesvary, Viktoria and Wu, Shuyun and Hsieh, Wen H. et al. (1995) Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives. Journal of Microelectromechanical Systems, 4 (1). pp. 18-27. ISSN 1057-7157. https://resolver.caltech.edu/CaltechAUTHORS:TEMjms95

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