Browse by Eprint ID
Number of items: 1. Temesvary, Viktoria and Wu, Shuyun and Hsieh, Wen H. et al. (1995) Design, fabrication, and testing of silicon microgimbals for super-compact rigid disk drives. Journal of Microelectromechanical Systems, 4 (1). pp. 18-27. ISSN 1057-7157. doi:10.1109/84.365366. https://resolver.caltech.edu/CaltechAUTHORS:TEMjms95 |