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Lubecke, Victor M. and McGrath, William R. and Tai, Yu-Chong et al. (1998) Microfabrication of linear translator tuning elements in submillimeter-wave integrated circuits. Journal of Microelectromechanical Systems, 7 (4). pp. 404-410. ISSN 1057-7157. https://resolver.caltech.edu/CaltechAUTHORS:LUBjms98

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