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Yang, Xing and Grosjean, Charles and Tai, Yu-Chong (1999) Design, fabrication, and testing of micromachined silicone rubbermembrane valves. Journal of Microelectromechanical Systems, 8 (4). pp. 393-402. ISSN 1057-7157. https://resolver.caltech.edu/CaltechAUTHORS:YANjms99

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