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Liu, Chang and Tai, Yu-Chong (1999) Sealing of micromachined cavities using chemical vapor deposition methods: characterization and optimization. Journal of Microelectromechanical Systems, 8 (2). pp. 135-145. ISSN 1057-7157. doi:10.1109/84.767109.

This list was generated on Mon Sep 26 23:35:45 2022 UTC.