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McGrath, William R. and Walker, Christopher and Yap, Markus et al. (1993) Silicon micromachined waveguides for millimeter-wave and submillimeter-wave frequencies. IEEE Microwave and Guided Wave Letters, 3 (3). pp. 61-63. ISSN 1051-8207. doi:10.1109/75.205665. https://resolver.caltech.edu/CaltechAUTHORS:MCGieeemmgwl93

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