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Chen, Po-Jui and Rodger, Damien C. and Humayun, Mark S. et al. (2008) Floating-Disk Parylene Microvalves for Self-Pressure-Regulating Flow Controls. Journal of Microelectromechanical Systems, 17 (6). pp. 1352-1361. ISSN 1057-7157. doi:10.1109/JMEMS.2008.2004947.

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