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Lim, B. S. and Ma, E. and Nicolet, M-A. et al. (1988) Silicon resistor to measure temperature during rapid thermal annealing. Review of Scientific Instruments, 59 (1). pp. 182-183. ISSN 0034-6748. doi:10.1063/1.1140004. https://resolver.caltech.edu/CaltechAUTHORS:LIMrsi88

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