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Im, S. and Song, J. H. and Lie, D. Y. C. et al. (1997) SiGeC alloy layer formation by high-dose C + implantations into pseudomorphic metastable Ge0.08Si0.92 on Si(100). Journal of Applied Physics, 81 (4). pp. 1700-1703. ISSN 0021-8979. doi:10.1063/1.364027.

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