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Bai, G. and Nicolet, M.-A. (1991) Defects production and annealing in self-implanted Si. Journal of Applied Physics, 70 (2). pp. 649-655. ISSN 0021-8979. doi:10.1063/1.349668. https://resolver.caltech.edu/CaltechAUTHORS:BAIjap91b

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