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Lubecke, Victor M. and McGrath, William R. and Stimson, Philip A. et al. (1998) Micromechanical tuning elements in a 620-GHz monolithic integrated circuit. IEEE Transactions on Microwave Theory and Techniques, 46 (12). pp. 2098-2103. ISSN 0018-9480. doi:10.1109/22.739288. https://resolver.caltech.edu/CaltechAUTHORS:LUBieeetmtt98

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