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Yun, Minhee and Bock, Jamie and Holmes, Warren et al. (2004) Microfabrication of silicon–nitride micromesh bolometric detectors for Planck high frequency instrument. Journal of Vacuum Science and Technology B, 22 (1). pp. 220-225. ISSN 1071-1023. doi:10.1116/1.1642644. https://resolver.caltech.edu/CaltechAUTHORS:YUNjvstb04

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