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Hwang, Gyeong S. and Giapis, Konstantinos P. (1997) On the origin of the notching effect during etching in uniform high density plasmas. Journal of Vacuum Science and Technology B, 15 (1). pp. 70-87. ISSN 1071-1023. https://resolver.caltech.edu/CaltechAUTHORS:HWAjvstb97c

This list was generated on Sun Oct 25 03:40:11 2020 PDT.