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Hwang, Gyeong S. and Giapis, Konstantinos P. (1997) On the origin of the notching effect during etching in uniform high density plasmas. Journal of Vacuum Science and Technology B, 15 (1). pp. 70-87. ISSN 1071-1023. http://resolver.caltech.edu/CaltechAUTHORS:HWAjvstb97c

This list was generated on Tue Oct 17 06:31:17 2017 PDT.