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McGill, T. C. and Kurtin, S. L. and Shifrin, G. A. (1970) Optical Reflection Studies of Damage in Ion Implanted Silicon. Journal of Applied Physics, 41 (1). pp. 246-251. ISSN 0021-8979. https://resolver.caltech.edu/CaltechAUTHORS:MCGjap70a

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