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Ivaldi, P. and Abergel, J. and Matheny, M. H. et al. (2011) 50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection. Journal of Micromechanics and Microengineering, 21 (8). Art. No. 085023. ISSN 0960-1317.

This list was generated on Tue Nov 21 21:40:37 2017 PST.