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Konishi, Satoshi and Liger, Matthieu and Harder, Theodore A. et al. (2004) Parylene-pyrolyzed carbon for MEMS applications. In: Micro Electro Mechanical Systems, 2004. Proceedings IEEE Micro Electro Mechanical Systems. IEEE , Piscataway, N.J., pp. 161-164. ISBN 0-7803-8265-X. http://resolver.caltech.edu/CaltechAUTHORS:20111014-101046643

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