A Caltech Library Service

Browse by Eprint ID

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Number of items: 1.

Harder, Theodore A. and Yao, Tze-Jung and He, Qing et al. (2002) Residual stress in thin-film parylene-C. In: 15th IEEE International Conference on Micro Electro Mechanical Systems. Proceedings: IEEE Micro Electro Mechanical Systems Workshop. IEEE , Piscataway, NJ, pp. 435-438. ISBN 0-7803-7185-2 .

This list was generated on Fri Oct 20 21:51:45 2017 PDT.