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Yang, Y. T. and Ekinci, K. L. and Huang, X. M. H. et al. (2001) Monocrystalline silicon carbide nanoelectromechanical systems. Applied Physics Letters, 78 (2). pp. 162-164. ISSN 0003-6951. doi:10.1063/1.1338959. https://resolver.caltech.edu/CaltechAUTHORS:YANapl01b

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