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Kolawa, E. and So, F. C. T. and Pan, E. T-S. et al. (1987) Reactively sputtered RuO2 diffusion barriers. Applied Physics Letters, 50 (13). pp. 854-855. ISSN 0003-6951. doi:10.1063/1.98012. https://resolver.caltech.edu/CaltechAUTHORS:KOLapl87

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