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Aydil, Eray S. and Giapis, Konstantinos P. and Gottscho, Richard A. et al. (1993) Ammonia plasma passivation of GaAs in downstream microwave and radio-frequency parallel plate plasma reactors. Journal of Vacuum Science and Technology B, 11 (2). pp. 195-205. ISSN 1071-1023. https://resolver.caltech.edu/CaltechAUTHORS:AYDjvstb93

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