A Caltech Library Service

Browse by Eprint ID

Number of items: 1.

Aydil, Eray S. and Giapis, Konstantinos P. and Gottscho, Richard A. et al. (1993) Ammonia plasma passivation of GaAs in downstream microwave and radio-frequency parallel plate plasma reactors. Journal of Vacuum Science and Technology B, 11 (2). pp. 195-205. ISSN 1071-1023. https://resolver.caltech.edu/CaltechAUTHORS:AYDjvstb93

This list was generated on Mon May 17 03:55:45 2021 PDT.

CaltechAUTHORS is powered by EPrints 3.3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.