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Hwang, Gyeong S. and Giapis, Konstantinos P. (1998) Modeling of charging damage during interlevel oxide deposition in high-density plasmas. Journal of Applied Physics, 84 (1). pp. 154-160. ISSN 0021-8979. doi:10.1063/1.368012. https://resolver.caltech.edu/CaltechAUTHORS:HWAjap98a

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