Browse by Eprint ID
Number of items: 1. Hwang, Gyeong S. and Giapis, Konstantinos P. (1998) Modeling of charging damage during interlevel oxide deposition in high-density plasmas. Journal of Applied Physics, 84 (1). pp. 154-160. ISSN 0021-8979. https://resolver.caltech.edu/CaltechAUTHORS:HWAjap98a |