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Cleland, A. N. and Roukes, M. L. (1996) Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals. Applied Physics Letters, 69 (18). pp. 2653-2655. ISSN 0003-6951. doi:10.1063/1.117548. https://resolver.caltech.edu/CaltechAUTHORS:CLEapl96

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