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Number of items: 1. McCaldin, J. O. and Sankur, H. (1972) Precipitation of Si from the Al metallization of integrated circuits. Applied Physics Letters, 20 (4). pp. 171-172. ISSN 0003-6951. doi:10.1063/1.1654096. https://resolver.caltech.edu/CaltechAUTHORS:MCCapl72 |