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Kattelus, H. P. and Tandon, J. L. and Sala, C. et al. (1986) Bias-induced stress transitions in sputtered TiN films. Journal of Vacuum Science and Technology A, 4 (4). pp. 1850-1854. ISSN 0734-2101. https://resolver.caltech.edu/CaltechAUTHORS:KATjvsta86

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