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Kattelus, H. P. and Kolawa, E. and Affolter, K. et al. (1985) Sputtered W–N diffusion barriers. Journal of Vacuum Science and Technology A, 3 (6). pp. 2246-2254. ISSN 0734-2101. doi:10.1116/1.572901. https://resolver.caltech.edu/CaltechAUTHORS:KATjvsta85

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