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Giapis, Konstantinos P. and Sadeghi, Nader and Margot, Joëlle et al. (1993) Limits to ion energy control in high density glow discharges: Measurement of absolute metastable ion concentrations. Journal of Applied Physics, 73 (11). pp. 7188-7194. ISSN 0021-8979. doi:10.1063/1.352391.

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