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Grétillat, M.-A. and Linder, C. and Dommann, A. et al. (1998) Surface-micromachined Ta–Si–N beams for use in micromechanics. Journal of Micromechanics and Microengineering, 8 (2). pp. 88-90. ISSN 0960-1317. https://resolver.caltech.edu/CaltechAUTHORS:GREjmm98

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