A Caltech Library Service

Browse by Eprint ID

Number of items: 1.

Hwang, G. S. and Anderson, C. M. and Gordon, M. J. et al. (1996) Gas-Surface Dynamics and Profile Evolution during Etching of Silicon. Physical Review Letters, 77 (14). pp. 3049-3052. ISSN 0031-9007. http://resolver.caltech.edu/CaltechAUTHORS:HWAprl96

This list was generated on Wed Feb 20 12:45:21 2019 PST.

CaltechAUTHORS is powered by EPrints 3.3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.