A Caltech Library Service

Browse by Eprint ID

Number of items: 1.

Hwang, G. S. and Anderson, C. M. and Gordon, M. J. et al. (1996) Gas-Surface Dynamics and Profile Evolution during Etching of Silicon. Physical Review Letters, 77 (14). pp. 3049-3052. ISSN 0031-9007. https://resolver.caltech.edu/CaltechAUTHORS:HWAprl96

This list was generated on Tue Jan 21 13:55:07 2020 PST.

CaltechAUTHORS is powered by EPrints 3.3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.