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Hwang, G. S. and Anderson, C. M. and Gordon, M. J. et al. (1996) Gas-Surface Dynamics and Profile Evolution during Etching of Silicon. Physical Review Letters, 77 (14). pp. 3049-3052. ISSN 0031-9007. doi:10.1103/PhysRevLett.77.3049. https://resolver.caltech.edu/CaltechAUTHORS:HWAprl96

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