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Hwang, Gyeong S. and Giapis, Konstantinos P. (1997) Aspect ratio independent etching of dielectrics. Applied Physics Letters, 71 (4). pp. 458-460. ISSN 0003-6951. doi:10.1063/1.119578. https://resolver.caltech.edu/CaltechAUTHORS:HWAapl97d

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