A Caltech Library Service

Browse by Eprint ID

Number of items: 1.

Hwang, Gyeong S. and Giapis, Konstantinos P. (1997) Aspect ratio independent etching of dielectrics. Applied Physics Letters, 71 (4). pp. 458-460. ISSN 0003-6951. https://resolver.caltech.edu/CaltechAUTHORS:HWAapl97d

This list was generated on Wed Oct 23 12:27:29 2019 PDT.

CaltechAUTHORS is powered by EPrints 3.3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.