A Caltech Library Service

Browse by Eprint ID

Number of items: 1.

Hwang, Gyeong S. and Giapis, Konstantinos P. (1997) Prediction of multiple-feature effects in plasma etching. Applied Physics Letters, 70 (18). pp. 2377-2379. ISSN 0003-6951. https://resolver.caltech.edu/CaltechAUTHORS:HWAapl97e

This list was generated on Fri Oct 15 17:11:40 2021 UTC.

CaltechAUTHORS is powered by EPrints 3.3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.