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Sankaran, R. M. and Giapis, K. P. (2001) Maskless etching of silicon using patterned microdischarges. Applied Physics Letters, 79 (5). pp. 593-595. ISSN 0003-6951. doi:10.1063/1.1388867. https://resolver.caltech.edu/CaltechAUTHORS:SANapl01

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