A Caltech Library Service

Browse by Eprint ID

Number of items: 1.

Dial, O. and Cheng, C. C. and Scherer, A. (1998) Fabrication of high-density nanostructures by electron beam lithography. Journal of Vacuum Science and Technology B, 16 (6). pp. 3887-3890. ISSN 1071-1023. doi:10.1116/1.590428. https://resolver.caltech.edu/CaltechAUTHORS:DIAjvstb98

This list was generated on Mon Dec 5 22:08:35 2022 UTC.

CaltechAUTHORS is powered by EPrints 3.3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.