A Caltech Library Service

Browse by Eprint ID

Number of items: 1.

Suzuki, Yuji and Tai, Yu-Chong (2006) Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers. Journal of Microelectromechanical Systems, 15 (5). pp. 1364-1370. ISSN 1057-7157. doi:10.1109/JMEMS.2006.879706. https://resolver.caltech.edu/CaltechAUTHORS:SUZjmems06

This list was generated on Wed Jun 7 17:08:49 2023 UTC.

CaltechAUTHORS is powered by EPrints 3.3 which is developed by the School of Electronics and Computer Science at the University of Southampton. More information and software credits.