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Suzuki, Yuji and Tai, Yu-Chong (2006) Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers. Journal of Microelectromechanical Systems, 15 (5). pp. 1364-1370. ISSN 1057-7157. doi:10.1109/JMEMS.2006.879706.

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