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Giapis, Konstantinos P. and Gottscho, Richard A. and Clark, Linda A. et al. (1991) Use of light scattering in characterizing reactively ion etched profiles. Journal of Vacuum Science and Technology A, 9 (3). pp. 664-668. ISSN 0734-2101. http://resolver.caltech.edu/CaltechAUTHORS:GIAjvsta91

This list was generated on Sat Nov 18 21:14:03 2017 PST.