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Fan, Long-Sheng and Tai, Yu-Chong and Muller, Richard S. (1988) Integrated movable micromechanical structures for sensors and actuators. IEEE Transactions on Electron Devices, 35 (6). pp. 724-730. ISSN 0018-9383. https://resolver.caltech.edu/CaltechAUTHORS:FANieeeted88

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