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Number of items: 1. Yang, H. Y. and Zhao, X.-A. (1988) Investigation of cosputtered W–C thin films as diffusion barriers. Journal of Vacuum Science and Technology A, 6 (3). pp. 1646-1649. ISSN 0734-2101. https://resolver.caltech.edu/CaltechAUTHORS:YANjvsta88 |