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Mehregany, Mehran and Tai, Yu-Chong (1991) Surface micromachined mechanisms and micromotors. Journal of Micromechanics and Microengineering, 1 (2). pp. 73-85. ISSN 0960-1317. https://resolver.caltech.edu/CaltechAUTHORS:MEHjmm91

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