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Scherer, A. and Craighead, H. G. and Roukes, M. L. et al. (1988) Electrical damage induced by ion beam etching of GaAs. Journal of Vacuum Science and Technology B, 6 (1). pp. 277-279. ISSN 1071-1023. doi:10.1116/1.584023. https://resolver.caltech.edu/CaltechAUTHORS:SCHEjvstb88

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