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Chen, Po-Jui and Rodger, Damien C. and Meng, Ellis M. et al. (2007) Surface-Micromachined Parylene Dual Valves for On-Chip Unpowered Microflow Regulation. Journal of Microelectromechanical Systems, 16 (2). pp. 223-231. ISSN 1057-7157. https://resolver.caltech.edu/CaltechAUTHORS:CHEjmems07

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