CaltechAUTHORS
  A Caltech Library Service

Items where Person is "Alty-H-R"

Up a level
Export as [feed] Atom [feed] RSS 1.0 [feed] RSS 2.0
Group by: Date | Item Type | First Author | No Grouping
Jump to: 2019 | 2018 | 2017
Number of items: 3.

2019

Lewis, Scott M. and Hunter, Matthew S. and DeRose, Guy A. et al. (2019) Plasma-etched pattern transfer of sub-10 nm structures using a metal–organic resist and helium ion beam lithography. Nano Letters, 19 (9). pp. 6043-6048. ISSN 1530-6984. http://resolver.caltech.edu/CaltechAUTHORS:20190819-134203388

2018

Lewis, Scott M. and DeRose, Guy A. and Alty, Hayden R. et al. (2018) Design and implementation of the next generation electron beam resists for the production of EUVL photomasks. In: Photomask Technology 2018. Proceedings of SPIE. No.10810. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, Art. No. 108100N. ISBN 9781510622159. http://resolver.caltech.edu/CaltechAUTHORS:20190117-111919486

2017

Lewis, Scott M. and Fernandez, Antonio and DeRose, Guy A. et al. (2017) Use of Supramolecular Assemblies as Lithographic Resists. Angewandte Chemie International Edition, 56 (24). pp. 6749-6752. ISSN 1433-7851. http://resolver.caltech.edu/CaltechAUTHORS:20170515-133021292

This list was generated on Mon Sep 23 01:35:39 2019 PDT.