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Items where Person is "Bartur-M"

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Jump to: 1984 | 1983 | 1982 | 1981
Number of items: 6.

1984

Bartur, M. and Nicolet, M.-A. (1984) Utilization of NiSi_2 as an interconnect material for VLSI. IEEE Electron Device Letters, 5 (3). pp. 88-90. ISSN 0741-3106. http://resolver.caltech.edu/CaltechAUTHORS:20170726-174538830

Bartur, M. and Nicolet, M-A. (1984) Self-confined metallic interconnects for very large scale integration. Applied Physics Letters, 44 (2). pp. 263-264. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:BARapl84a

1983

Bartur, M. and Nicolet, M-A. (1983) Marker experiments for diffusion in the silicide during oxidation of PdSi, Pd2Si, CoSi2, and NiSi2 films on <Si>. Journal of Applied Physics, 54 (9). pp. 5404-5415. ISSN 0021-8979. http://resolver.caltech.edu/CaltechAUTHORS:BARjap83

1982

Bartur, M. and Nicolet, M-A. (1982) Thermal oxidation of nickel disilicide. Applied Physics Letters, 40 (2). pp. 175-177. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:BARapl82a

1981

Bartur, M. and Nicolet, M-A. (1981) Electrical characteristics of Al contact to NiSi using thin W layer as a barrier. Applied Physics Letters, 39 (10). pp. 822-824. ISSN 0003-6951. http://resolver.caltech.edu/CaltechAUTHORS:BARapl81

Nicolet, M-A. and Bartur, M. (1981) Diffusion barriers in layered contact structures. Journal of Vacuum Science and Technology, 19 (3). pp. 786-793. ISSN 0022-5355. http://resolver.caltech.edu/CaltechAUTHORS:NICjvst81

This list was generated on Tue Apr 23 23:01:19 2019 PDT.