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Jump to: 1996
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1996

Reid, J. S. and Kolawa, E. and Garland, C. M. et al. (1996) Amorphous (Mo, Ta, or W)–Si–N diffusion barriers for Al metallizations. Journal of Applied Physics, 79 (2). pp. 1109-1117. ISSN 0021-8979. https://resolver.caltech.edu/CaltechAUTHORS:REIjap96

This list was generated on Wed Oct 16 01:31:25 2019 PDT.