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Items where Person is "Lukichev-V-F"

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Welch, Colin C. and Olynick, Dierdre L. and Liu, Zuwei et al. (2013) Formation of nanoscale structures by inductively coupled plasma etching. In: International Conference Micro- and Nano-Electronics 2012. Proceedings of SPIE. No.8700. Society of Photo-optical Instrumentation Engineers (SPIE) , Bellingham, WA, Art. No. 870002. ISBN 9780819494870.

This list was generated on Sat Jun 12 15:57:10 2021 PDT.